Babban aikace-aikacen don wannan samfurin shine amfani kai tsaye azaman ultpure CVD Precursor.
Samun microprocess da kwakwalwan kwamfuta suna buƙatar cvd precursors na musamman da aka yi daga Inntachlaide "tsarkakakkiyar tsabta".
Hannun makamashi na adana fitilun Halogen fasalin yana nuna zafi wanda ke nuna Layer da aka yi da pentachilile petachilillide.
A cikin samar da masu ɗaukar nauyin yumbu (MLCCs), Penntachlorippedachlorlorilloride na bayar da tallafi don ingantawa ta foda.
Hakanan ana amfani da tsarin Sol-gel don wannan dalili a kan samar da riguna na daidaituwa.
Ana amfani da Penntachililide na Niobium a aikace-aikacen catalytic.