Babban aikace-aikacen wannan samfurin shine amfani da shi kai tsaye azaman maƙasudin CVD mai ƙima.
Samar da microprocessors da kwakwalwan ƙwaƙwalwar ajiya suna buƙatar precursors na musamman na CVD da aka yi daga niobium pentachloride "Mafi Girma Tsarkaka".
Fitilolin halogen na ceton makamashi yana da wani Layer mai nuna zafi da aka yi da niobium pentachloride.
A cikin samar da masu ƙarfin yumbura masu yawa (MLCCs), niobium pentachloride yana ba da tallafi don inganta ƙirar foda.
Hakanan ana amfani da tsarin sol-gel da aka yi amfani da shi don wannan dalili a cikin samar da kayan kwalliyar sinadarai.
niobium pentachloride ana amfani dashi a aikace-aikacen catalytic.